- Specifications
- Documentation
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Specifications |
LIP 481 V |
LIP 481 U |
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Areas of application |
High vacuum, up to 1 · 10–7 mbar |
Ultrahigh vacuum, up to 1 · 10–11 mbar |
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Measuring standard* Coefficient of linear expansion |
SUPRADUR phase grating on glass or Zerodur glass ceramic Glass: αtherm 8 · 10–6 K–1; Zerodur glass ceramic: αtherm (0 ± 0.1) · 10–6 K–1 |
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Accuracy grade* |
±1 µm, ±0.5 µm |
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Baseline error |
≤ ±0.175 µm/5 mm |
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Measuring length ML* in mm |
70 120 170 220 270 320 370 420 |
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Reference marks |
One at midpoint of measuring length |
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Output signals |
1 VPP |
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Signal period |
2 µm |
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Cutoff frequency –3 dB |
≥ 300 kHz |
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Traversing speed |
36 m/min |
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Interpolation error Position noise RMS |
±7 nm 2 nm (450 kHz) |
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Supply voltage Current consumption |
DC 5 V ±5% < 190 mA |
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Electrical connection |
15-pin D-sub connector (male); interface electronics integrated in connector |
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Housing feed-through* (see page 4) |
None (interface electronics in a vacuum) |
D-sub connector (not included in delivery; interface electronics not in a vacuum) |
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Cable length of scanning head to APE* |
0.5 m or 1 m |
0.5 m or 1 m to the housing feed-through and 0.5 m to the APE |
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Other cable lengths on request, but ≤ 3 m between scanning head and APE |
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Cable length after APE |
≤ 20 m (with HEIDENHAIN cable) |
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Vibration 55 Hz to 2000 Hz Shock 11 ms |
≤ 200 m/s2 (EN 60068-2-6) ≤ 500 m/s2 (EN 60068-2-27) |
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Operating temperature |
0 °C to 40 °C |
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Baking temperature |
100 °C |
120 °C |
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Materials |
PCB: Ceramic Adhesives: UHV-compatible, temperature resistant |
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Mass Scanning head Connector Scale Connecting cable |
50 g (without cable) 32 g; with integrated interface electronics: 140 g 5.6 g + 0.2 g/mm measuring length 38 g/m |
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* Please select when ordering |
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